Admat can supply discs as large as 29" diameter
Our tantalum sputtering target material has high purity, fine and uniform grain size, and is perfect for semiconductor applications. We can produce material as plates, discs, rings, and crucibles. Send Admat your specifications for review.
| Typical Sputtering-Grade Tantalum Purity (ppm) | ||||
|---|---|---|---|---|
| Impurities | 5N Ta | 4N5 Ta | 4N Ta | 3N5 Ta |
| Fe | <1 | <1 | <1 | <5 |
| Ni | <1 | <1 | <1 | <5 |
| Cr | <1 | <1 | <1 | <5 |
| Cu | <1 | <1 | <1 | <5 |
| Ti | <1 | <1 | <1 | <5 |
| Nb | <10 | <50 | <100 | <500 |
| W | <8 | <10 | <30 | <150 |
| Mo | <5 | <10 | <10 | <30 |
| Na | <0.4 | <0.4 | <1 | <5 |
| Li | <0.1 | <0.1 | <1 | <5 |
| K | <0.4 | <0.4 | <1 | <5 |
| U | <0.001 | <0.005 | <0.005 | <0.005 |
| Th | <0.001 | <0.005 | <0.005 | <0.005 |
| Others | <0.1 | <1 | <5 | <10 |
| C | <10 | <10 | <20 | <30 |
| O | <50 | <50 | <100 | <200 |
| N | <30 | <30 | <30 | <50 |
| H | <5 | <5 | <10 | <10 |
Notes:
For guidance only. Specifications determined with customers.
Metallic impurities measured by GDMS 4N and higher purity materials.
Gaseous impurities measured by LECO
