Admat is focused on providing niobium sputtering targets with ideal properties for your application. Whether your business is chemical vapor deposition, physical vapor deposition, optics or semiconductor, Admat can supply the right material at the right price. All materials come with chemistry and mechanical certifications. Forward your exact requirements to Admat for review.
| Typical Sputtering Target Grade Properties |
| Purity: |
> 99.99% |
|
|
| Size: |
Up to 25 inch diameter or width |
|
|
| Tolerance: |
+/- 0.01” all dimensions |
|
Tighter tolerance available |
|
|
| Surface Finish: |
RMS32 or better |
|
Ra 1.0 micron for roughness |
|
<0.3 mm for flatness |
|
|
| Grain Size: |
<100 microns |
|
Uniform |
| Typical Sputtering Target Niobium Purity (ppm) |
| Element |
Typical |
Max |
| C |
<25 |
40 |
| H |
<10 |
20 |
| N |
<50 |
150 |
| O |
<100 |
150 |
|
|
|
| Cr |
<10 |
50 |
| Fe |
<20 |
50 |
| Ni |
<20 |
50 |
| Hf |
<20 |
300 |
| Mn |
<10 |
50 |
| Mo |
<20 |
50 |
| Si |
<50 |
100 |
| Ta |
<200 |
1000 |
| W |
<100 |
300 |
| Zr |
<20 |
100 |
| Other, each |
<5 |
10 |
| Other, total |
<20 |
50 |
